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压阻式流速传感器研究
引用本文:卢晓敏,金建东,董宇红,赵异凡.压阻式流速传感器研究[J].传感器与微系统,2004,23(5):6-8.
作者姓名:卢晓敏  金建东  董宇红  赵异凡
作者单位:中国电子科技集团公司,第四十九研究所,黑龙江,哈尔滨,150001
摘    要:介绍了一种流速传感器的工作原理、结构设计和关键工艺。该传感器基于毕托管的工作原理来测量流速,采用压阻式差压传感器测量流体中的总压与静压之差。整个装置体积小、重量轻,可实现便携式检测。对流速传感器的标定测试方法进行了探讨和试验验证,实际测量和使用表明:流速测量结果准确可靠,准确度达0.5%FS。

关 键 词:压阻式  流速传感器  差压  毕托管
文章编号:1000-9787(2004)05-0006-03
修稿时间:2004年12月22日

Study on piezoresistive flow velocity sensor
LU Xiao-min,JIN Jian-dong,DONG Yu-hong,ZHAO Yi-fan.Study on piezoresistive flow velocity sensor[J].Transducer and Microsystem Technology,2004,23(5):6-8.
Authors:LU Xiao-min  JIN Jian-dong  DONG Yu-hong  ZHAO Yi-fan
Abstract:The operation principle,structure design and key technique of a flow velocity sensor are presented.Based on the Pitot tube principle,the flow velocity is measured,and the piezoresistive differential pressure sensor is used to measure the difference between the total hydro-pressure and the static pressure.The device has the characteristics of small size,light weight and portable measurement.From the practical measurement and application,it is shown that the measurement result of flow velocity is reliable and the accuracy is 0.5 %FS.
Keywords:piezoresistive  flow velocity sensor  differential pressure  Pitot tube
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