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Micromachined catalytic combustible hydrogen gas sensor |
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| Authors: | Eui-Bok LeeAuthor VitaeIn-Sung HwangAuthor Vitae Jung-Ho ChaAuthor VitaeHo-Jun LeeAuthor Vitae Won-Bae LeeAuthor VitaeJames Jungho PakAuthor Vitae Jong-Heun LeeAuthor VitaeByeong-Kwon JuAuthor Vitae |
| Affiliation: | a Display and Nanosystem Laboratory, School of Electrical Engineering, College of Engineering, Korea University, 5-1, Anam-dong, Seongbuk-Gu, Seoul 136-713, Republic of Korea b Department of Materials Science and Engineering, Korea University, Seoul 136-713, Republic of Korea c Seju Engineering, 611-11, Guam-Dong, Yusung-Gu, Daejeon 305-801, Republic of Korea d Microelectronics & Micro/Nano System Lab., College of Engineering, Korea University, Seoul 136-713, Republic of Korea |
| Abstract: | An integrated catalytic combustion H2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm2 and the catalytic combustion sensor showed high response to H2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H2 were 0.36 s and 1.29 s, respectively. |
| Keywords: | Catalytic combustion MEMS Hydrogen gas sensor |
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