| 硅压力传感器可靠性强化试验研究 |
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| 引用本文： | 吴虹,李延夫. 硅压力传感器可靠性强化试验研究[J]. 微纳电子技术, 2007, 44(7): 288-290 |
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| 作者姓名： | 吴虹 李延夫 |
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| 作者单位： | 沈阳仪表科学研究院,沈阳,110043 |
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| 摘 要： | 为实现硅压力传感器的快速评价和快速提高传感器可靠性的目标，综合分析了国际上先进的可靠性强化试验理论与技术，并应用失效物理学原理，对硅压力传感器可靠性强化试验技术剖面进行了研究性评述。
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| 关 键 词： | 硅压力传感器 可靠性可靠性强化试验 研究 |
| 文章编号： | 1671-4776（2007）07/08-0288-03 |
| 修稿时间： | 2007-04-26 |
Study on Reliability Enhancement Test for Silicon Pressure Sensor |
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| WU Hong,LI Yan-fu. Study on Reliability Enhancement Test for Silicon Pressure Sensor[J]. Micronanoelectronic Technology, 2007, 44(7): 288-290 |
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| Authors: | WU Hong LI Yan-fu |
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| Affiliation: | Shenyang Academy of Instrumentation Science, Shenyang 110043, China |
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| Abstract: | In order to realize quick evaluating and improving for the reliability of Si pressure sensor, the international advanced enhancing experimental theories and technologies were analyzed, the enhancing experimental measurement technologies of pressure sensors was investigated by the theory of failure physics. |
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| Keywords: | silicon pressure sensor reliability enhancement test study |
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