Highly transparent and conducting indium-doped zinc oxide films by spray pyrolysis

Spray pyrolysis has been used to deposit highly transparent and conducting films of indium-doped zinc oxide. The roles of various deposition parameters have been investigated and the optimum deposition conditions have been outlined. Without any post-deposition heat treatment, as-deposited films with a resistivity of about $\text{(8 ? 9) × 10}{}^{-4}\text{Ω}\text{cm}$ and an average visible transmittance of about 85% have been obtained. The structural, electrical and optical properties have been studied. The electron transport properties suggest that the films are degenerate and the mobility data can be understood in terms of a grain boundary trapping model.