| 纳秒脉冲激光对水下靶材的掩模微细刻蚀加工 |
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| 引用本文： | 张朝阳,陈飞,王耀民,毛卫平,张永康. 纳秒脉冲激光对水下靶材的掩模微细刻蚀加工[J]. 纳米技术与精密工程, 2011, 9(2): 180-184 |
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| 作者姓名： | 张朝阳 陈飞 王耀民 毛卫平 张永康 |
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| 作者单位： | 江苏大学机械工程学院,镇江,212013 |
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| 基金项目： | 国家自然科学基金资助项目，教育部博士点新教师基金资助项目，中国博士后科研基金资助项目，江苏省博士后科研基金资助项目，高校高级人才启动基金资助项目 |
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| 摘 要： | 在激光的传输光路中加入掩模板,采用纳秒脉冲激光对水下靶材进行了掩模微细刻蚀加工,与飞秒激光微细加工相比可显著提高加工效率,加工精度由掩模保证.在所构建的试验系统中,分别在空气中、纯水中和盐溶液中进行了加工试验,在水流的作用下,激光辐照的多余热量被带走,加工边缘热影响区明显减小.同时,水下激光辐照还会在加工区域造成光学击穿,产生等离子体冲击波,在水层的约束限制作用下,加工表现出了明显的冲击波力学效应.通过这种热-力学的复合效应,使金属材料表面产生材料去除和变形的加工效果.最终在质量分数为15%的NaNO3的溶液中,利用热-力学效应和化学反应的复合作用,实现了线宽120μm左右、热影响区小、成形精度较好的微细刻蚀加工.
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| 关 键 词： | 微细加工 纳秒脉冲激光 掩模板 等离子体冲击波 热-力学效应 |
Mask-Integrated Micro-Etching of Underwater Workpiece with Nanosecond Pulse Laser |
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| ZHANG Zhao-yang,CHEN Fei,WANG Yao-min,MAO Wei-ping,ZHANG Yong-kang. Mask-Integrated Micro-Etching of Underwater Workpiece with Nanosecond Pulse Laser[J]. Nanotechnology and Precision Engineering, 2011, 9(2): 180-184 |
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| Authors: | ZHANG Zhao-yang CHEN Fei WANG Yao-min MAO Wei-ping ZHANG Yong-kang |
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| Affiliation: | ZHANG Zhao-yang,CHEN Fei,WANG Yao-min,MAO Wei-ping,ZHANG Yong-kang (School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China) |
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| Abstract: | By integrating mask into the transmit path of laser,microcopy of the mask image on the workpiece surface was achieved with nanosecond pulse laser under water.Compared with femtosecond pulse laser micro-machining,the proposed approach was significantly higher in machining efficiency and its precision was determined by the mask.In the experimental system established,nanosecond pulse laser micro-etching was employed in the air,water and salt solution,respectively.Excess heat of the laser ablation was taken awa... |
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| Keywords: | micro-machining nanosecond pulse laser mask plasma shock wave thermal-mechanical effect |
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