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Preparation of ZrO2 fine particles by CVD process: Thermal decomposition of zirconium tert-butoxide vapor |
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| Authors: | Helmi Keskinen Pavel Moravec Jiří Smolík Valeri V. Levdansky Jyrki M. Mäkelä Jorma Keskinen |
| Affiliation: | (1) Institute of Physics, Tampere University of Technology, Tampere, Finland;(2) Institute of Chemical Process Fundamentals AS CR, Rozvojová 135, 165 02 Prague 6-Suchdol, Czech Republic;(3) Heat and Mass Transfer Institute NASB, 15 P. Brovka St., Minsk, 220072, Belarus |
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