| 一种新型多功能快速分光式膜厚仪 |
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| 引用本文： | 蔡旭阳,孙大雄,菊池和夫. 一种新型多功能快速分光式膜厚仪[J]. 光学仪器, 1999, 0(Z1) |
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| 作者姓名： | 蔡旭阳 孙大雄 菊池和夫 |
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| 作者单位： | 新科隆株式会社!东京140-8540 |
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| 摘 要： | 介绍了一种高性能的多通道光学薄膜膜厚监控系统的设计与制作，系统使用了ＣＣＤ作为线阵探测器。详细论述了光源、接收器以及光纤导光系统的设计过程。实验表明该设备可以用于高精度高速测量，也适合于监控制作多层膜滤光片。
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| 关 键 词： | 光学厚度监控 多通道光谱仪 光学薄膜 |
A New Multifunction,High Speed Multi-channel Optical Thickness Monitor |
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| CAI Xuyang SON Daiyu KIKUCHI Kazuo. A New Multifunction,High Speed Multi-channel Optical Thickness Monitor[J]. Optical Instruments, 1999, 0(Z1) |
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| Authors: | CAI Xuyang SON Daiyu KIKUCHI Kazuo |
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| Abstract: | A high performance multi channel optical monitor for coating has been designed and fabricated.A linear CCD is employed as the detector,and the design details of light source,receiver,and the fiber optics are given.It shown that the technique described in this paper allows for high accuracy control and high speed measurement,as well as allowing for monitoring multi layer filters. |
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| Keywords: | Optical Thickness Monitor Multi channel Sepectroadiometer Optical Coatings |
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