| 脉冲激光溅射沉积YBCO超导薄膜 |
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| 引用本文： | 梁素平,蒋毅坚.脉冲激光溅射沉积YBCO超导薄膜[J].应用激光,2002,22(2):236-240. |
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| 作者姓名： | 梁素平 蒋毅坚 |
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| 作者单位： | 北京工业大学国家产学研激光技术中心,北京,100022 |
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| 基金项目： | 北京市自然科学基金(2002005) |
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| 摘 要： | 从激光与材料相互作用理论出发,分析了激光烧蚀材料等离子体羽辉的空间运动特征和成分分布;以YBCO/SrTiO_3为对象,从实验上系统研究了脉冲激光溅射沉积薄膜过程中薄膜质量与基片温度、基片-靶材距离、气体压强、激光脉冲能量以及重复频率等参数的关系;总结出在SrTiO_3(100)单晶基片上溅射沉积YBCO高温超导薄膜的最佳实验参数。
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| 关 键 词： | 脉冲激光溅射沉积 YBCO超导薄膜 最佳实验参数 |
YBCO superconducting thin films prepared by bulsed laser deposition |
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| LIANG Su - ping,JIANG Yi - jian.YBCO superconducting thin films prepared by bulsed laser deposition[J].Applied Laser,2002,22(2):236-240. |
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| Authors: | LIANG Su - ping JIANG Yi - jian |
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| Abstract: | According to the theory of interaction between laser and materials, the spatial features and the distribution of composition of plume were analyzed. The effects of deposition parameters which include the substrate temperature, the target - substrate distance, ambient oxygen pressure, pulse laser energy and laser frequency on the deposition characteristics of YBCO thin films grown on SrTiO3 (100) substrate were investigated experimentally. The most optimizing experimental parameters are obtained. |
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| Keywords: | PLD YBCO superconducting thin films the mcxst optimizing experimental parameters |
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