| 用热丝法在激光预处理的硬质合金表面沉积金刚石薄膜的研究 |
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| 引用本文： | 李成明,吕反修.用热丝法在激光预处理的硬质合金表面沉积金刚石薄膜的研究[J].热加工工艺,1996(1):26-27. |
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| 作者姓名： | 李成明 吕反修 |
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| 作者单位： | 太原工业大学，北京科技大学 |
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| 摘 要： | 研究了准分子激光对硬质合金（ＹＧ６）表面产生的选择性蒸发和表面改性作用（粗糙化），探索在硬质合金表面沉积金刚石薄膜的工艺参数，讨论了温度、气体流量及甲烷浓度对沉积金刚石薄膜的影响规律．
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| 关 键 词： | 准分子激光，选择性蒸发，硬质合金，金刚石薄膜 |
Study of Deposited Diamond Filims on Hard Alloy of Laser Pretreated on HFCVD |
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| Li Chengming,Wang Jianming,Xu Zhong,Lu Fanxin, Liao Xiaoning.Study of Deposited Diamond Filims on Hard Alloy of Laser Pretreated on HFCVD[J].Hot Working Technology,1996(1):26-27. |
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| Authors: | Li Chengming Wang Jianming Xu Zhong Lu Fanxin Liao Xiaoning |
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| Affiliation: | Li Chengming;Wang Jianming;Xu Zhong;Lu Fanxin; Liao Xiaoning |
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| Abstract: | Selective evaporation and surface modification on hard alloy surface by excimer laser were studied.It was investigated that the process parameters of diamond films deposited on the hard alloy.The effect of temperature,flow rate and methane concentration on diamond films depositing are discussed. |
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| Keywords: | excimer laser svlective evaporation hard alloy diamond films |
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