| 热处理气氛对ZnO透明导电膜性能的影响 |
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| 引用本文： | 张凯红,靳正国,赵宏生.热处理气氛对ZnO透明导电膜性能的影响[J].功能材料,2009,40(10). |
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| 作者姓名： | 张凯红 靳正国 赵宏生 |
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| 作者单位： | 1. 清华大学,核能与新能源技术研究院,北京,100084
2. 天津大学,先进陶瓷与加工实验室,天津,300072 |
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| 基金项目： | 天津市应用基础研究计划资助项目(07JCZDJX00900); 清华大学基础研究基金资助项目(JCq2005045) |
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| 摘 要： | 采用溶胶-凝胶法、在空气、Ar气、H2气中热处理制备Al3+、F-掺杂的致密ZnO薄膜.利用XRD、SEM、分光光度计和四探针测试仪对薄膜性质进行表征.研究表明,强还原性H2气处理促进了薄膜晶界中吸附氧的解吸,减少了晶界处缺陷数目,有利于薄膜晶化程度和载流子浓度提高,所制得掺杂ZnO薄膜最低方阻为10Ω/□,在可见光范围内的达透射率在可达90%以上,性能接近ITO导电薄膜.
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| 关 键 词： | 溶胶-凝胶 AZO薄膜 FZO薄膜 光电性能 |
Influence of heat-treatment atmosphere on properties of ZnO transparent conductive oxide films |
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| ZHANG Kai-hong
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JIN Zheng-guo
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ZHAO Hong-sheng.Influence of heat-treatment atmosphere on properties of ZnO transparent conductive oxide films[J].Journal of Functional Materials,2009,40(10). |
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| Authors: | ZHANG Kai-hong JIN Zheng-guo ZHAO Hong-sheng |
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| Affiliation: | ZHANG Kai-hong1,JIN Zheng-guo2,ZHAO Hong-sheng1(1.Division of New Materials,Institute of Nuclear and New Energy Technology,Tsinghua University,Beijing 100084,China,2.Key Laboratory of Advanced Ceramics and Machining Technology,Ministry of Education,Tianjin University,Tianjin 300072,China) |
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| Abstract: | ZnO thin films doped with Al3+,F-were prepared on glass substrates by sol-gel method with homogenous,dense hexagonal wurtzite structure after heat-treatment in Air,Ar and H2.XRD,SEM,UV-vis and four-point probe method were used to characterize the ZnO based thin films.The results indicate that heat-treatment in strong reducing H2 promotes the desorption of oxygen,reduces the number of the defects at the grain boundaries,improves the crystal degree and carrier concentration.Optimum properties of the ZnO films... |
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| Keywords: | sol-gel AZO film FZO film electrical and optical properties |
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