| 新型sol-gel技术制备BST 0-3型厚膜 |
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| 引用本文： | 陈书厅,姚熹,张良莹. 新型sol-gel技术制备BST 0-3型厚膜[J]. 电子元件与材料, 2005, 24(1): 19-21 |
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| 作者姓名： | 陈书厅 姚熹 张良莹 |
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| 作者单位： | 同济大学功能材料研究所,上海,200092;同济大学功能材料研究所,上海,200092;同济大学功能材料研究所,上海,200092 |
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| 基金项目： | 国家重点基础研究发展计划(973计划);上海市学科科研项目 |
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| 摘 要： | 采用传统高温固相烧结法合成了Ba0.6Sr0.4TiO3(BST)陶瓷粉,并用高能球磨法将其细化为纳米粉,均匀分散于组分相同的BST溶胶中,形成稳定的厚膜先体溶液,而后用匀胶法制备出厚度约为6.5μm的BST厚膜。XRD测试结果表明,650℃热处理后的厚膜为单一钙钛矿相。SEM观测显示厚膜表面均匀一致,无裂纹出现。800℃热处理后的厚膜在室温、频率1kHz下相对介电常数εr和介质损耗tgδ分别为455、0.036。
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| 关 键 词： | 无机非金属材料 BST厚膜 新型sol-gel技术 高能球磨 介电性能 |
| 文章编号： | 1001-2028(2005)01-0019-03 |
Fabrication of BST Thick Films Using a New Sol-gel Process |
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| CHEN Shu-ting,YAO Xi,ZHANG Liang-ying. Fabrication of BST Thick Films Using a New Sol-gel Process[J]. Electronic Components & Materials, 2005, 24(1): 19-21 |
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| Authors: | CHEN Shu-ting YAO Xi ZHANG Liang-ying |
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| Abstract: | Ba0.6Sr0.4TiO3 powders were produced by conventional high temperature solid-state reactions method. Then the powders were ball milled into sizes of nanometer by a higher energy planetary ball mill machine and uniformly dispersed into BST sol-gel matrix whose composition is same as the powders. 6.5 μm thick films were fabricated using a spin-coating method. The XRD analysis indicates that the thick films annealed at 650℃ possess single-phase perovskite type structure. The SEM micrograph shows that the thick films are uniform and crack-free. Dielectric constant εr and dielectric loss tgδ of the thick film annealed at 800℃ are 455, 0.036, respectively. |
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| Keywords: | inorganic non-metallic materials BST thick film new sol-gel technology high energy ball-milling dielectric properties |
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