用透射光栅谱仪测量多层膜的反射特性

软X射线多层膜是当前应用光学和工程光学的研究热点之一,反射率是其性能和膜层质量最直观的参数,它的测量对了解多层膜性能和改进多层膜制备工艺具有重要意义。本文介绍采用带有前置光学系统的大面积透射光栅光谱仪分光,让软X射线多层膜反射+1级或-1级软X射线,用国产的SIOFM型X射线胶片接受软X射线,通过测量可定性地判断多层膜制备质量,为改进多层膜制备工艺提供重要的参考依据。

The Experimental Study of Reflective Performance for Soft X-ray Multilayers

Soft X ray multilayer coating is the one of studied hot points in applied and engineering optics. The reflectivity of multilayers is the most important parameter of multilayer coating performance and coating quality. The measurements of multilayer coatings is key to study the performance of coatings and improve the techniques of manufabrication. The relative reflectance measurements of some soft X ray multilayers were completed successfully by splitting the spectrum of a laser produced plasma source from a large area transmission grating spectrograph with a pre optics, +1 or -1 order spectrum was reflected by a multilayer. Another arrangement was that +1 order spectrum was reflected by one multilayer whose reflectance was known and -1 order spectrum was reflected by one multilayer whose reflectance was unknown. The SIOFM X ray film made in China was used. The results of measurements show whether the quality of multilayers was good and provide some important basis for improving the technique of fabricating multilayers.