| 日盲型紫外探测系滤光膜的研制 |
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| 引用本文： | 闫昊,付秀华,郑爽.日盲型紫外探测系滤光膜的研制[J].长春光学精密机械学院学报,2012(2):5-8. |
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| 作者姓名： | 闫昊 付秀华 郑爽 |
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| 作者单位： | 长春理工大学光电工程学院,长春130022 |
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| 摘 要： | 针对紫外探测系统利用紫外日盲区的特殊要求,选取HfO2和Mgf2、JGS1三种高低折射率材料组合形式。在石英基底上,采用电子束和离子辅助沉积技术及石英晶体振荡监控厚度方法。对HfO2和JGS1膜电子束沉积工艺进行了研究,对HfO2与不同材料组合的沉积工艺进行了优化,解决了膜层与基底之间附着力的问题,同时改善了Mgf2膜随厚度变化易的龟裂现象。研究了0.24~0.28μm紫外日盲波段薄膜的沉积工艺和光谱特性问题。
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| 关 键 词： | 薄膜 离子辅助沉积 紫外增透 组合工艺 |
Design and Fabrication of Visible-blind UV Detectors System Filter |
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| YAN Hao,FU Xiuhua,ZHENG Shuang.Design and Fabrication of Visible-blind UV Detectors System Filter[J].Journal of Changchun Institute of Optics and Fine Mechanics,2012(2):5-8. |
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| Authors: | YAN Hao FU Xiuhua ZHENG Shuang |
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| Affiliation: | (School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022) |
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| Abstract: | According to the special requirements of blind of high and low index material combination forms was area of uv detection system, HfO2, Mgf2 and GS1 three kinds selected. The monitoring method was adopted in the JGS1 base by using electron beam, ion auxiliary deposition and quartz crystal oscillation technology. This paper studied the HfO2 and Mgfz film deposition technology electron beam, optimized the HfOe in different materials combination of the deposi- tion process, and solved the basement membrane layer and adhesion; Meanwhile improve the crack phenomenon with the thickness variation of Mgf2. The 0.24-0.28/xm ultraviolet, thin film deposition blind band process and spectral character- isitics problem. |
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| Keywords: | the films ion assisted deposition ultraviolet antireflection combination process~ -/~ ＇~＇ ITI~_I~Z~L ~JE_EI~ ~__]~ Ll l~bk~ ~z：：~--~- ＇~ O~ -- Omk＊g~ -/~ ~ ~t~-~7~ ~ ~lihl~k~ ~-_ ~I l~＇Tl~ d EEl |
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