| 外延薄膜生长的实时监测分析研究 |
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| 引用本文： | 李金隆,张鹰,邓新武,刘兴钊,陶伯万,李言荣.外延薄膜生长的实时监测分析研究[J].功能材料,2004,35(2):265-266,270. |
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| 作者姓名： | 李金隆 张鹰 邓新武 刘兴钊 陶伯万 李言荣 |
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| 作者单位： | 电子科技大学,微电子与固体电子学院,四川,成都,610054 |
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| 摘 要： | 利用反射式高能电子衍射(RHEED)在超高真空中对SrTiO3(100)、LaAlO3(100)、Si(100)单晶基片进行分析,讨论了衍射花样与晶体表面结构的对应关系,计算出表面的晶体学参数,同时采用激光分子束外延技术同质外延生长SrTiO3薄膜，根据RHEED衍射图样及强度振荡曲线实时监控薄膜的生长。
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| 关 键 词： | 薄膜生长 实时监测 RHEED 反射式高能电子衍射 外延生长 |
| 文章编号： | 1001-9731(2004)02-0265-02 |
Study of real time monitoring epitaxial thin film growth |
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| LI Jin-long,ZHANG Ying,DENG Xin-wu,LIU Xin-zhao,TAO bo-wan,LI Yan-rong.Study of real time monitoring epitaxial thin film growth[J].Journal of Functional Materials,2004,35(2):265-266,270. |
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| Authors: | LI Jin-long ZHANG Ying DENG Xin-wu LIU Xin-zhao TAO bo-wan LI Yan-rong |
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| Abstract: | In ultrahigh vacuum the surface structure of the SrTiO_3,LaAlO_3 and Si single crystal substrates was analysed by reflective high energy electron diffraction(RHEED). The relationship between the diffraction patterns and the surface structure was discussed and the crystal lattice constants were obtained. Homoepitaxy of SrTiO_3 thin film was performed by laser molecular beam epitaxy(LMBE). With the diffraction patterns and the intensity oscillations of RHEED,the layer-by-layer growth of the thin film was in-situ monitored. |
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| Keywords: | thin film growth real time monitoring RHEED |
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