Structural and photocatalytic properties of TiO2/SiOx/TiOx multi-layer prepared by electron-beam evaporation method

TiO₂/SiO_x/TiO_x multi-layers on quartz glass were prepared by electron-beam evaporation method and their structural and photocatalytic properties were investigated. The photocatalytic activity of the TiO₂/SiO_x/TiO_x multi-layer was evaluated by the photodecomposition of methylene blue in aqueous solution. As the thickness of the SiO_x inter-layer increased, the surface roughness of the TiO₂/SiO_x/TiO_x multi-layer increased but the anatase crystallite size decreased. The TiO₂/SiO_x(80 nm)/TiO_x multi-layer exhibited excellent photocatalytic activity resulting from higher surface roughness and more trap levels in the SiO_x(80 nm) inter-layer.