PZT thick films by diol chemical solution deposition |
| |
Authors: | S Gentil M Kohli A Seifert |
| |
Affiliation: | (1) EPFL-STI-IMX, Ceramic Laboratory, Lausanne, Switzerland;(2) IR Microsystems, PSE-C, Lausanne, Switzerland |
| |
Abstract: | Process optimization and properties of lead zirconate titanate (PZT) films for piezoelectric micromachined ultrasonic transducers
(pMUTs) for scanning probe devices will be presented. The goal of the work was a replacement of the tetragenic and mutagenic
solvent and a decrease of time-consuming PZT 2–methoxy ethanol (2MOE) route. An alternative diol-based solution synthesis
process was developed and “Design Of Experiment” (DOE) was used to achieve processing optimization for thick and crack free
films. Tight parameter control allowed to develop a highly reproducible PZT diol process. The crystallization behaviour of
crack-free PbZr0.53Ti0.47O3 films (1–5 μm) with oriented perovskite structure was examined by X-ray diffraction and surface analysis using scanning electron
microscopy. Piezoelectric and dielectric properties were examined. The effective transverse piezoelectric coefficient e
31,f of sol–gel processed films was investigated for 4 μm thick layers. Best properties were achieved with {1 0 0}-textured films,
where a remanent e
31,f value of −7.3 C/m2 was measured for 4.1 μm thick films. |
| |
Keywords: | PMUT PZT film Design of experiment Chemical solution deposition Diol based solutions |
本文献已被 SpringerLink 等数据库收录! |
|