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Micro-ERDA studies of hydrogen in polycrystalline CVD diamond windows |
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| Authors: | R Samlenski Ch Haug R Delto Ch Wild R Brenn |
| Affiliation: | a Department of Physics and Materials Research Center, University of Freiburg, Hermann-Herderstrasse 3, D-79104 Freiburg/Br, Germany b Fraunhofer Institute for Applied Solid State Physics, Freiburg, Germany |
| Abstract: | The incorporation of hydrogen in thick polycrystalline chemical vapour deposition diamond plates has been studied by elastic recoil detection with a 2.8 MeV He+ microbeam. Hydrogen-rich inclusions of lateral dimensions 50–100 μm have been found and analysed quantitatively by depth resolved hydrogen area maps and line scans. The laterally averaged hydrogen content and its depth profile were also characterized by the 1H(15N,  γ)12C reaction. The observed hydrogen-rich inclusions correlate with features visible in optical microscopy but not with the optically visible crystallite topography. |
| Keywords: | Hydrogen Polycrystalline CVD diamond Nuclear microprobe Ion beam analysis |
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