The design and characterization of nonoverlapping superself-aligned BiCMOS technology

An optimal device structure for integrating bipolar and CMOS is described. Process design and device performance are discussed. Both the vertical n-p-n and MOS devices have non-overlapping super self-aligned (NOVA) structures. The base-collector and source/drain junction capacitances are significantly reduced. This structure allows complete silicidation of active polysilicon electrodes, cutting down the parasitic resistances of source, drain, and extrinsic base. The critical gate and emitter regions are protected from direct reactive ion etching exposure and damage. All shallow junctions are contacted by polysilicon electrodes which suppress silicide-induced leakage. An arsenic buried layer minimizes collector resistance and collector-substrate capacitance. A novel selective epitaxy capping technique suppresses lateral autodoping from the arsenic buried layer. Fully recessed oxide with polysilicon buffer layer is used to achieve a low defect density device isolation. CMOS with L_eff=1.1 μm and W _n/W_p=10 μm/10 μm exhibits averaged ring oscillator delay of 128 ps/stage. An n-p-n transistor with f_T, of 14 GHz and low-power emitter-coupled logic ring oscillator with a delay of 97 ps/stage have been fabricated