| 均匀周期极化化学计量比钽酸锂晶片的制备 |
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| 引用本文： | 贾宝申,谭千里,赵业权.均匀周期极化化学计量比钽酸锂晶片的制备[J].半导体光电,2010,31(1):75-78. |
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| 作者姓名： | 贾宝申 谭千里 赵业权 |
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| 作者单位： | 哈尔滨工业大学航天学院,哈尔滨,150001;重庆光电技术研究所,重庆,400060 |
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| 摘 要： | 采用添加助熔剂(K2O)的方法,成功制备了近化学计量比钽酸锂晶体,并基于1mol%MgO掺杂的化学计量比钽酸锂晶体周期性畴反转制备光参量振荡器(OPO)。通过在晶片表面形成占空比为60%的聚酰亚胺周期结构并利用液体电极施加极化电压,运用三步电压极化技术,制备出Z向切割1mm厚的均匀周期极化化学计量比钽酸锂晶片,晶片的畴反转占空比接近50%。
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| 关 键 词： | 近化学计量比钽酸锂 周期极化 参量振荡器 |
Fabrication of Homogenous Periodically Poled Stoichiometric Lithium Tantalate Wafer |
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| JIA Baoshen,TAN Qianli,ZHAO Yequan.Fabrication of Homogenous Periodically Poled Stoichiometric Lithium Tantalate Wafer[J].Semiconductor Optoelectronics,2010,31(1):75-78. |
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| Authors: | JIA Baoshen TAN Qianli ZHAO Yequan |
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| Affiliation: | 1.School of Astronautics;Harbin Institute of Technology;Harbin 150001;CHN;2.Chongqing Optoeletronics Research Institute;Chongqing 400060;CHN |
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| Abstract: | Near-stoichiometric lithium tantalate crystals were grown by adding flux(K_2O) and optical parametric oscillator(OPO) was fabricated based on the periodically poled 1 mol% MgO-doped stoichiometric lithium tantalate crystal. A PI polyimide photoresist grating with duty cycle 60% was deposited on +Z surface of the wafer and LiCl saturated solution was used as liquid electrode. Homogenous periodically-poled near-stoichiometric lithium tantalate wafer with 1 mm thickness was fabricated by means of a three-step poling technique. The duty cycle of the inverted domain is close to 50 %. |
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| Keywords: | near-stoichiometric lithium tantalate periodically polarization optical parametric oscillator |
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