Experimental verification of an out-of-plane repulsive-force electrostatic actuator using a macroscopic mechanism |
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Authors: | Siyuan He John S Chang |
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Affiliation: | (1) Department of Mechanical and Industrial Engineering, Ryerson University, 350 Victoria Street, Toronto, ON, M5B 2K3, Canada |
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Abstract: | A macroscopic mechanism is developed to verify a repulsive-force electrostatic actuator, which consists of an array of fixed
finger electrodes and an array of moving finger electrodes. The actuator is able to generate an asymmetric electric field
surrounding the top and bottom surfaces of each moving finger electrode to push the moving finger up and away from the fixed
fingers. The macroscopic mechanism consists of a macro repulsive force actuator, a high voltage power supply, a z-stage, a
high precision balance and a LCR meter. The force and capacitance characteristic curves of the actuator are obtained using
the macro mechanism. The 3-stage force (repulsive, zero and attractive forces) of the actuator is verified, as well as the
effects of the moving finger width on the actuator’s performance. Experimental tests show that the macro repulsive-force actuator
can generate a repulsive force of 3,000 μN with a maximum gap of 9.5 mm for generating a repulsive force. |
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Keywords: | |
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