| 基于MEMS微型振动式发电机的计算与模拟分析 |
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| 引用本文： | 唐彬,温中泉,温志渝,董媛,刘雪花.基于MEMS微型振动式发电机的计算与模拟分析[J].微纳电子技术,2007,44(9):881-884,891. |
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| 作者姓名： | 唐彬 温中泉 温志渝 董媛 刘雪花 |
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| 作者单位： | 重庆大学,微系统研究中心,光电技术及系统教育部重点实验室,重庆,400044 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 提出了一种基于驻极体的MEMS微型振动式发电机,该微型发电机通过极化电荷在由振动引起变化的电容极板之间转移,实现外部振动机械能向电能的转换。在已研制出的驻极体材料基础上,通过对微型振动式发电机的叉指参数、驻极体与电极的间距等参数进行了计算分析,从理论上得到了最大功率为250μW的微型振动式发电机模型。
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| 关 键 词： | 微机电系统 驻极体 振动 发电机 |
| 文章编号： | 1671-4776（2007）09-0881-04 |
| 修稿时间： | 2006-12-16 |
Calculation and Simulation of MEMS Electret-Based Micro Vibration Power Generator |
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| TANG Bin,WEN Zhong-quan,WEN Zhi-yu,DONG Yuan,LIU Xue-hua.Calculation and Simulation of MEMS Electret-Based Micro Vibration Power Generator[J].Micronanoelectronic Technology,2007,44(9):881-884,891. |
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| Authors: | TANG Bin WEN Zhong-quan WEN Zhi-yu DONG Yuan LIU Xue-hua |
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| Affiliation: | Key Laboratory of Optoelectronic Technology and Systems, Micro-System Research Center, Chongqing University, Chongqing 400044, China |
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| Abstract: | A novel MEMS electrets-based micro vibration power generator which could convert vibration energy of outside to electrical energy by capacitive conversion was proposed.Based on a kind of prepared and characterized electret material,the basic structure of a micro vibration power generator and the optimized dimensions of interdigital fingers,electret,and the gap between electrodes and the electret were analyzed.Finally,the peak power of the micro vibration power generator is calculated to be 250 μW. |
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| Keywords: | MEMS electret vibration generator |
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