| 铁电纳米结构的浸渍涂敷法制备和微结构STEM表征(英文) |
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| 引用本文： | 朱信华,朱健民,周舜华,刘治国. 铁电纳米结构的浸渍涂敷法制备和微结构STEM表征(英文)[J]. 电子显微学报, 2008, 27(4) |
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| 作者姓名： | 朱信华 朱健民 周舜华 刘治国 |
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| 作者单位： | 南京大学物理系固体微结构物理国家重点实验室,江苏,南京,210093 |
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| 摘 要： | 本文利用浸渍涂敷法在硅基多孔氧化铝模版介质(孔径20nm-100nm)上制备了Pb(Zr0.53Ti0.47))3(PZT)铁电纳米结构,并利用扫描透射电子显微镜(STEM)观察了其表面形貌和剖面微结构.TEM像和X-射线能谱分析结果表明在多孔氧化铝模版孔道内形成了PZT纳米结构,其横向尺寸可通过改变氧化铝模版的孔径来调节.采用浸渍涂敷法可使PZT溶液贯穿整个氧化铝纳米孔道,在其内壁形成PZT涂层,厚度为4nm-15nm.氧化铝纳米孔道内的黑色TEM衬度线证实了PZT涂层的存在,其存在方式为连续介质型或离散的晶粒形状.平面STEM像显示PZT纳米结构具有椭球状形貌,这可能是由氧化铝纳米孔道的局部扭曲或PZT溶液在退火过程中的收缩引起的.在硅基多孔氧化铝模版介质上采用浸渍涂敷法制备的PZT有序纳米结构,在将来三维结构的非挥发性铁电存储器方面具有十分诱人的应用前景.
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| 关 键 词： | 铁电纳米结构 浸渍涂敷 |
Ferroelectric nanostructures fabricated by dip-coating process and microstructural characterization by scanning transmission electron microscopy |
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| ZHU Xin-hua,ZHU Jian-min,ZHOU Shun-hua,LIU Zhi-guo. Ferroelectric nanostructures fabricated by dip-coating process and microstructural characterization by scanning transmission electron microscopy[J]. Journal of Chinese Electron Microscopy Society, 2008, 27(4) |
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| Authors: | ZHU Xin-hua ZHU Jian-min ZHOU Shun-hua LIU Zhi-guo |
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| Affiliation: | ZHU Xin-hua,ZHU Jian-min,ZHOU Shun-hua,LIU Zhi-guo(National Laboratory of Solid State Microstructures,Department of Physics,Nanjing University,Nanjing Jiangsu 210093,China) |
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| Abstract: | In this work we report on lead zirconate titanate(PZT) ferroelectric nanostructures fabricated by dip-coating process on silicon substrates covered by nano-porous alumina membranes with pore sizes of 20 nm-100 nm served as templates.Microstructures of the PZT ferroelectric nanostructures were examined by scanning transmission electron microscopy(STEM) with both planar and cross-sectional samples.Cross-sectional TEM images,in conjunction with energy dispersive Xray elemental analyses revealed the presence of... |
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| Keywords: | PZT STEM ferroelectric nanostructures PZT dip-coating STEM |
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