硅基PZT压电驱动MEMS光开关的设计与优化

采用压电多层悬臂梁理论分析模型 ,研究了一种新型PZT压电复合多层膜悬臂梁驱动光开关的机械性能 ,探讨了结构参数与悬臂梁机械性能的关系及影响光开关机电性能的因素。提出了一种新的硅基PZT压电复合膜悬臂梁驱动光开关的制作方法。给出了 2 5V工作电压下优化的器件结构 ,并对理论分析结果与压电复合多层膜悬臂梁的有限元耦合场分析结果进行了比较

Design and optimization of MEMS optical switch actuated by piezoelectric cantilever based on Si

The mechanical performance of a novel optical switch actuated by PZT piezoelectric multiple layer cantilever is studied with piezoelectric multiple layer cantilever analysis model, in which the relationship between structure parameters and the mechanical performance and some factors that have an effect on the performance of this optical switch are discussed. A new fabrication process method of the optical switch actuated by piezoelectric multiple layer cantilever based on Si is presented. An optimal design of the optical switch operating at 25V is presented. The theory analysis result is compared with that from the finite element coupling field analysis.