| 材料放气率测量方法评述 |
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| 引用本文： | 张涤新,曾祥坡,冯焱,卢耀文,赵澜. 材料放气率测量方法评述[J]. 真空, 2010, 47(6) |
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| 作者姓名： | 张涤新 曾祥坡 冯焱 卢耀文 赵澜 |
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| 作者单位： | 兰州物理研究所; |
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| 摘 要： | 材料放气率被用于评价真空材料性能,随着理论研究的深入和实践经验的积累,对材料放气率测试方法有了更具体和更深刻的认识。本文介绍了瑞士、德国、日本、印度以及国内材料放气率测试技术的发展,并对各装置的结构特点和性能指标进行了评述。
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| 关 键 词： | 放气率 压力上升率 流导法 系统本底 |
Review of measuring methods of outgassing rate |
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| ZHANG Di-xin,ZENG Xiang-po,FENG Yan,LU Yao-wen,ZHAO Lan. Review of measuring methods of outgassing rate[J]. Vacuum(China), 2010, 47(6) |
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| Authors: | ZHANG Di-xin ZENG Xiang-po FENG Yan LU Yao-wen ZHAO Lan |
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| Affiliation: | ZHANG Di-xin,ZENG Xiang-po,FENG Yan,LU Yao-wen,ZHAO Lan(Lanzhou Institute of Physics,Lanzhou 730000,China) |
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| Abstract: | The outgassing rate of a material is important to the evaluation indices of its vacuum performance.With the progress of theoretical studies and experience accumulated from practice,the measuring methods have been understood more concretely and profoundly.The R&D of measuring techniques of outgassing rate in Switzerland,Germany,Japan,India and China are reviewed and discussed,including the initial pressure measurement,structural characteristics and performance indices. |
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| Keywords: | outgassing rate pressure increasing rate flow conductance method background of system |
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