| 蓝宝石镀膜方法研究 |
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| 引用本文： | 尹旭琴,李仰军,卫丽芬,武毅,刘建勋.蓝宝石镀膜方法研究[J].光学仪器,2009,31(6):68-71. |
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| 作者姓名： | 尹旭琴 李仰军 卫丽芬 武毅 刘建勋 |
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| 作者单位： | 中北大学,信息与通信工程学院,山西,太原,030051 |
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| 摘 要： | 蓝宝石具有一系列优异的光学和力学性能，使其在现代镀膜领域中倍受青睐。在一些高科技领域中，蓝宝石作为重要的功能材料，为实现不同的功能，选择不同的镀膜材料来实现。介绍了蓝宝石的主要物理性能，并对其作为衬底的几种镀膜方法作了简单介绍，包括磁控溅射法、脉冲激光沉积法、金属有机化学气相沉积法、电子柬蒸发法。
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| 关 键 词： | 蓝宝石 物理性能 镀膜方法 |
Study on coating method of sapphire |
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| YIN Xuqin,LI Yangjun,WEI Lifen,WU Yi,LIU Jianxun.Study on coating method of sapphire[J].Optical Instruments,2009,31(6):68-71. |
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| Authors: | YIN Xuqin LI Yangjun WEI Lifen WU Yi LIU Jianxun |
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| Affiliation: | (College of Information and Communication Engineering, North University of China, Taiyuan 030051, China) |
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| Abstract: | Sapphire is a desired material for modern coating field because of its excellent optical and mechanical properties. In some high-tech fields, the sapphire as an important functional material, in order to achieve different functions, so choose different coating materials. In the work, the physical properties of sapphire and various coating methods of sapphire is used for underlay, such as magnetron sputtering, pulsed laser deposition, metal organic chemical vapor deposition and E-beam evaporation. |
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| Keywords: | sapphire physical properties coating method |
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