溶胶—凝胶法制备TiO2—SiO2复合薄膜的研究

采用溶胶－凝胶方法在单晶Ｓｉ基片上制备了ＴｉＯ２－ＳｉＯ２复合薄膜，研究了溶剂、ｐＨ值对先体溶液成胶时间的作用，溶液的浓度、甩胶时的旋转速度、涂覆层数以及热处理温度对薄膜厚度、光学性能的影响。薄膜的折射率随温度增大，其主要贡献来自于薄膜中结构的变化。并测量了薄膜的Ｉ－Ｖ、Ｃ－ｆ特性，由于薄膜中的热击穿效应而使得ＴｉＯ２含量较高的薄膜２的Ｉ－Ｖ呈非线性变化。

Sol-gel TiO 2 SiO 2 Films on Silicon Substrates

TiO 2 SiO 2 thin films have been prepared on silicon substrates by a sol gel method. The gelling time of solution is affected by the solvent and pH. The thickness of thin films and optical properties are technology dependent. The technology includes concentration of solution, spinning speed, annealing temperature and number of layers. The refractive index of thin films increasing with annealing temperature is resulted from the structural developing. Electrical properties of thin films have also been studied.