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980 nm高功率VCSEL的光束质量
引用本文:李特,宁永强,孙艳芳,崔锦江,郝二娟,秦莉,套格套,刘云,王立军,崔大复,许祖彦. 980 nm高功率VCSEL的光束质量[J]. 中国激光, 2007, 34(5): 41-645
作者姓名:李特  宁永强  孙艳芳  崔锦江  郝二娟  秦莉  套格套  刘云  王立军  崔大复  许祖彦
作者单位:1. 中国科学院长春光学精密机械与物理研究所激发态物理重点实验室,吉林,长春,130033;中国科学院研究生院,北京,100039
2. 中国科学院长春光学精密机械与物理研究所激发态物理重点实验室,吉林,长春,130033
3. 中国科学院研究生院,北京,100039;中国科学院长春光学精密机械与物理研究所,吉林,长春,130033
4. 中国科学院物理研究所,北京,100080
摘    要:利用CCD成像技术,设计出一种简单的测量垂直腔面发射激光器(VCSEL)的光束质量因子M2的方法。在注入电流分别为900mA,1500mA,3000mA和6000mA时,对出光孔径300μm,激射波长为980nm的垂直腔底面发射激光器的束腰等光束参数进行了测量,并应用激光光束传播的高斯方程拟合求得了M2因子的值分别为66,58,44和53。另外,当注入电流为900mA和3000mA时,对器件的远场分布进行了分析并测得了器件的远场发散角,测量值与理论计算值吻合较好。

关 键 词:激光器  垂直腔面发射激光器  光束质量因子  远场发散角  注入电流  高功率
文章编号:0258-7025(2007)05-0641-05
收稿时间:2006-10-18
修稿时间:2006-10-18

Beam Quality of 980 nm High Power Vertical-Cavity Surface-Emitting Laser
LI Te,NING Yong-qiang,SUN Yan-fang,CUI Jin-jiang,HAO Er-juan,QIN Li,TAO Ge-tao,LIU Yun,WANG Li-jun,CUI Da-fu,XU Zu-yuan. Beam Quality of 980 nm High Power Vertical-Cavity Surface-Emitting Laser[J]. Chinese Journal of Lasers, 2007, 34(5): 41-645
Authors:LI Te  NING Yong-qiang  SUN Yan-fang  CUI Jin-jiang  HAO Er-juan  QIN Li  TAO Ge-tao  LIU Yun  WANG Li-jun  CUI Da-fu  XU Zu-yuan
Affiliation:1 Key Laboratory of Excited State Processes, Changchun Institute of Optics,Fine Mechanics and Physics, The Chinese Academy of Sciences, Changchun , J ilin 130033, China ; 2Graduate School of the Chinese Academy of Sciences, Beijing 100039, China ; 3 Changchun Institute of Optics, Fine Mechanics and Physics, The Chinese Academy of Sciences, Changchun, Jilin 130033, China ;4 Institute of Physics, The Chinese Academy of Sciences, Beijing 100080, China
Abstract:A simple method to measure the beam quality factor (M2) of high-power vertical-cavity surface-emitting laser (VCSEL) was designed by employing the charge coupled device (CCD) technology. When the injection currents were 900 mA, 1500 mA, 3000 mA and 6000 mA, respectively, the waists of a 980 nm bottom-emitting VCSEL with a 300 μm aperture were measured and the values of M2 were 66, 58, 44 and 53, respectively, which were calculated by Gauss fitting. In addition, far-field pattern was analyzed as the injection currents were 900 mA and 3000 mA. At the same time, far-field angles were measured and the values of them were in good agreement with the calculated value exactly.
Keywords:lasers  vertical-cavity surface-emitting laser  beam quality factor  far-field angles  injection current  high power
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