| 真空微电子三极管几何参数的设计考虑 |
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| 引用本文： | 秦明,黄庆安.真空微电子三极管几何参数的设计考虑[J].微电子学,1993,23(5):36-39. |
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| 作者姓名： | 秦明 黄庆安 |
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| 作者单位： | 东南大学微电子中心 江苏南京210018
(秦明，黄庆安)，东南大学微电子中心 江苏南京210018(袁璟) |
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| 摘 要： | 真空微电子三极管是近年来兴起与发展的真空微电子学中的一类重要器件。本文从真空微三极管的工作特性出发,分析了这类器件中所需考虑的几何参数和工作特性的关系,并给出了一些理论和实验公式,为今后的设计提供一些参考。
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| 关 键 词： | 真空微电子学 场发射 真空三极管 |
Considerations on the Design of the Geometric Parameters for Vacuum Microelectronic Triodes |
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| Qin Ming,Huang Qing' an and Yuan Jing
Microelectronics Center,Southeast University. ,Nanjing.Jiangsu.Considerations on the Design of the Geometric Parameters for Vacuum Microelectronic Triodes[J].Microelectronics,1993,23(5):36-39. |
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| Authors: | Qin Ming Huang Qing' an and Yuan Jing
Microelectronics Center Southeast University NanjingJiangsu |
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| Affiliation: | Qin Ming,Huang Qing' an and Yuan Jing
Microelectronics Center,Southeast University. 210018,Nanjing.Jiangsu |
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| Abstract: | Vacuum microelectronic triodes are one of the most important devices in vacuum microelectronics developed in recent years. Based on the operating properties of the vacuum microtriode, the relationship between the geometric parameters and the operation performances for the device is analyzed in the paper. Both theoretical and experimental formulars are presented, which can be used for references for future design. |
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| Keywords: | Vacuum microelectronics Vacuum microtriode Field emission |
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