边缘驱动双腔可变形透镜的设计及制备

针对基于边缘驱动的可变形透镜无法进行球差像差的问题，该文提出了一种边缘驱动双腔可变形透镜结构。上腔体压电圆环32个致动器，校正除球差外的其余低阶像差，主要包括离焦、像散及慧差的校正。下腔体压电圆环1个致动器，通过与上腔致动器的相互作用，实现球差的校正。搭建了可变形透镜性能测试平台并进行了实验。实验结果表明，该可变形透镜能重构前4阶Zernike像差。

Design and Fabrication of Edge-Driven Dual Cavity Deformable Lens

In order to solve the problem that the deformable lens based on edge drive cannot perform spherical aberration, an edge-driven double cavity deformable lens structure is proposed in this paper. There are 32 actuators in the upper cavity piezoelectric ring, which mainly correct the other low-order aberrations except the spherical aberration, mainly including the correction of defocus, astigmatism and coma. The lower cavity piezoelectric ring has one actuator, which realizes the correction of spherical aberration through the interaction with the upper cavity actuator. A testing platform for the deformable lens performance is actually set up and the experiment is carried out. The experimental results show that the proposed deformable lens can reconstruct the first four Zernike aberrations.