抗磁悬浮静电电机悬浮与驱动特性研究

微型电机随着特征尺度的降低，其表面效应凸显，摩擦问题急剧突出。抗磁悬浮技术具有无摩擦、被动自稳定、尺度效应下浮重比显著提升等特点，是解决微型电机机械摩擦问题的一种有效途径。提出了一种基于抗磁悬浮静电驱动的微型电机方案，研制了转子直径为10 mm的定子下置式微型抗磁悬浮静电电机；基于永磁体电流等效模型，推导了抗磁悬浮静电电机磁通密度表达形式，建立了抗磁悬浮力的数学模型，获得了悬浮力与悬浮高度的关系并进行了实验验证；基于电容静电能原理，建立了抗磁悬浮静电电机的驱动力矩数学模型，获得了静电驱动力与定子输入电压、悬浮高度的关系并进行了实验验证；开展了旋转实验研究，分析了输入电压、环境湿度对转速的影响规律，获得了抗磁悬浮静电电机的驱动特性。本研究将会为高性能微型抗磁悬浮静电电机的研究提供支撑。

Research on Levitation and Driven Characteristics of Diamagnetic Levitation Electrostatic Motor

For the micro motor, the friction problem is becoming seriously with the scale reduction. The diamagnetic levitation technology possesses the merits such as frictionless, passive self-stabilization and increase buoyancy-weight ratio under scale effect, which is an effective way to solve the friction problem. A micro motor with a 10 mm diameter rotor based on diamagnetic levitation and electrostatic driven principles is developed. Based on the current equivalent model of permanent magnet, the expression of magnetic flux density is deduced, the mathematical model of diamagnetic levitation force is established. The relationship between levitation force and levitation height is obtained and verified by experiments. Based on the principle of capacitance electrostatic energy, the mathematical model of electrostatic motor driven torque is established. The relationship between electrostatic driven force, stator input voltage and suspension height are obtained and verified. Based on the rotation experiment, the influence of input voltage and environmental humidity on rotation speed are analysed, and the electrostatic motor driven characteristics are obtained. This research can provide a foundation for developing high-performance micro diamagnetic levitation electrostatic driven motor.