| 硅电容差压传感器批量测试工装夹具的设计 |
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| 引用本文： | 陈玉玲,匡石,刘波,张哲. 硅电容差压传感器批量测试工装夹具的设计[J]. 传感器世界, 2009, 15(7): 23-26 |
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| 作者姓名： | 陈玉玲 匡石 刘波 张哲 |
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| 作者单位： | 沈阳仪表科学研究院,辽宁沈阳,110179;沈阳仪表科学研究院,辽宁沈阳,110179;沈阳仪表科学研究院,辽宁沈阳,110179;沈阳仪表科学研究院,辽宁沈阳,110179 |
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| 摘 要： | 针对硅电容差压传感器测试项目,达到对被测传感器实现批量、快速、连续的测试要求,设计了硅电容差压传感器测试工装夹具,并对其进行了有限元受力分析,充分证明了夹具的设计满足了测试过程对夹具的材料,密封性、轻便性以及各部分结构中心对准等的要求.
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| 关 键 词： | 硅电容差压传感器 测试装置 工装夹具 |
Design of frock clamp for batch test of Si-capacitive differential pressure sensor |
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| CHEN Yu-ling,KUANG Shi,LIU Bo,ZHANG Zhe. Design of frock clamp for batch test of Si-capacitive differential pressure sensor[J]. Sensor World, 2009, 15(7): 23-26 |
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| Authors: | CHEN Yu-ling KUANG Shi LIU Bo ZHANG Zhe |
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| Affiliation: | CHEN Yu-ling,KUANG Shi,LIU Bo,ZHANG Zhe (Shenyang Academy of Instrumentation Science,Shenyang 110179,China) |
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| Abstract: | In order to meet the requests of Si-capacitive differential pressure sensor for fast, continuous batch test, a frock clamp is designed in this paper. The design is analyzed by finite element analysis method and the results prove that the design can meet the requests for lamp material ? Airtightness, handiness and alignment of every part configuration centers in the course of test . |
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| Keywords: | Si-capacitive differential pressure sensor test equipment frock clamp |
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