High accuracy quartz crystal thin film monitor |
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Authors: | Ramadan B Piyakis K Kos J F |
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Affiliation: | Department of Physics and Astronomy, Universtiy of Regina, Regina, Saskatchewan, Canada. |
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Abstract: | A quartz resonator thin film monitor of exceptionally high accuracy and resolution has been developed. It is capable of providing measurements with an effective resolution of 0.001 nm and a corresponding relative accuracy of about 1% for a 0.100-nm-thick film of gold. A novel dual oscillator and mixer using integrated circuits is also described. |
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