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| Structural Un-uniformity and Electrical Anisotropy of μc-Si:H Films | |
| 摘 要： | Structural un-uniformity and electrical anisotropy of μc-Si∶H film are investigated in this paper. It is found that the structure of μc-Si∶H film along the direction perpendicular to the substrate is not uniform, which is modulated by film thickness. In addition, there is a dark conductivity anisotropy along the direction parallel(σ∥) and perpendicular(σ⊥)to the substrate in μc-Si∶H film. The reasons for such an property of μc-Si∶H film and the effect of oxygen contamination are analyzed. |
| 关 键 词： | μc-Si∶H thin film micro-structure anisotropy electrical property |
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