Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating |
| |
Authors: | Imrich Gablech author-information" >,Jakub Somer,Zdenka Fohlerová,Vojtěch Svatoš,Jan Pekárek,Stanislav Kurdík,Jianguo Feng,Peter Fecko,Pavel Podešva,Jaromír Hubálek,Pavel Neužil |
| |
Affiliation: | 1.Central European Institute of Technology,Brno University of Technology,Brno,Czech Republic;2.Department of Microelectronics, Faculty of Electrical Engineering and Communication,Brno University of Technology,Brno,Czech Republic;3.Northwestern Polytechnical University,Xi’an,People’s Republic of China |
| |
Abstract: | We developed an advanced method for fabricating microfluidic structures comprising channels and inputs/outputs buried within a silicon wafer based on single level lithography. We etched trenches into a silicon substrate, covered these trenches with parylene-C, and selectively opened their bottoms using femtosecond laser photoablation, forming channels and inputs/outputs by isotropic etching of silicon by xenon difluoride vapors. We subsequently sealed the channels with a second parylene-C layer. Unlike in previously published works, this entire process is conducted at ambient temperature to allow for integration with complementary metal oxide semiconductor devices for smart readout electronics. We also demonstrated a method of chip cryo-cleaving with parylene presence that allows for monitoring of the process development. We also created an observation window for in situ visualization inside the opaque silicon substrate by forming a hole in the parylene layer at the silicon backside and with local silicon removal by xenon difluoride vapor etching. We verified the microfluidic chip performance by forming a segmented flow of a fluorescein solution in an oil stream. This proposed technique provides opportunities for forming simple microfluidic systems with buried channels at ambient temperature. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|