| CMP终点监测装置的设计 |
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| 引用本文： | 王学军,王姝媛,贺敬良,柳滨,周国安.CMP终点监测装置的设计[J].半导体技术,2008,33(8). |
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| 作者姓名： | 王学军 王姝媛 贺敬良 柳滨 周国安 |
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| 作者单位： | 北京信息科技大学,北京,100192;北京中油燃气有限公司,北京,100032;中国电子科技集团公司第四十五研究所,北京,101601 |
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| 基金项目： | 北京市教委科技发展计划 |
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| 摘 要： | 对CMP工艺过程中的一种终点监测技术进行论述,分析了国外某公司抛光机的电机电流变化监测技术,在此基础上,设计了一种高精度的电流监测和电流电压转换电路,电流监测基于LTC6102高精度电流监测放大器,电流电压转换电路基于MAX472高精度电流传感放大电路和MAX951微功耗/比较放大电路.改进的电路构成简单,监测精度高,成功实现了从安培级的负载电流中辨别出微安级电流变化的精度.实验证明,该电路精度好于1%,显著提高了终点监测精度.
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| 关 键 词： | 化学机械抛光 终点监测 电流电压转换 |
Design of CMP End-Point Detector |
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| Wang Xuejun,Wang Shuyuan,He Jingliang,Liu Bin,Zhou Guoan.Design of CMP End-Point Detector[J].Semiconductor Technology,2008,33(8). |
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| Authors: | Wang Xuejun Wang Shuyuan He Jingliang Liu Bin Zhou Guoan |
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| Affiliation: | Wang Xuejun1,Wang Shuyuan2,He Jingliang1,Liu Bin3,Zhou Guoan3(1.Beijing Information Science , Technology University,Beijing 100192,China,2. Petro China Gas Fuel Co.,Ltd.,Beijing 100032,3.The 45th Research Institute,CETC,Beijing 101601,China) |
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| Abstract: | A CMP end point detector technology was discussed, a sort of foreign motor current-flow detective technology was analyzed. Base on this, a high precision current-flow inspect and C/V conversion circuit was designed. Current-flow inspecting was based on high precision current-flow inspect amplifier LTC1602, and C/V conversion circuits was based on precision, high-side current-sense amplifier MAX472 and ultra-low-power, comparator, operational amplifier MAX591. The improved circuit is succinct and has high de... |
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| Keywords: | CMP end-point detective C/V transform |
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