消像差光栅的理论及实验研究

对消像差光栅进行了理论和实验研究。用光程函数和费马原理研究光栅的成像,用刻槽分布函数表示光栅的刻槽曲率及间距变化。对成像的理论分析表明光栅刻槽分布函数比刻槽间距更容易表达像差,给出了消像差光栅的表达形式。比较了SD、WFA、LPF等光栅的参数优化方法。探讨了消像差光栅密度的干涉测量法,设计了光路,对光栅密度进行了测量。

Theory, design, manufacture and measurement of aberration reducing gratings

Fermat's principle and light path functions were used to analyze the aberration of gratings. The groove pattern function was employed to express the curvature and groove space of aberration reducing gratings, and the dispersive system containing a single grating was discussed. The groove pattern function contains more information about the imaging properties of the grating than groove space, and there is no need to project the grooves. Several expressions of aberration reducing gratings are given. The design manufacture and measurement of aberration reduced gratings are discussed. And the gratings measured by interference.