带标准分度转台的激光角度干涉仪的不准直误差模型

为了探讨带标准分度转台的激光角度干涉仪在测量过程中的安装不准直误差对测量结果的影响,在分析回转轴转角误差测量原理的基础上,根据测量光路的几何特征变化规律,提出测量系统的不准直误差模型。研究不准直误差变化对转角误差测量结果的影响,明确了为保证最终测量结果的精度在±1″内宜采取的误差控制措施。通过与自准直仪配合高精度多面棱体方法进行比对实验,并利用不准直误差模型对测量结果进行修正后,可以将测量结果的最大差值减小为-0.52″。结果表明所建立的误差模型的正确性,在准确评估和提高测量系统的精度上有一定的推广价值。

Error Model of Angular Misalignments for Laser Angle Interferometer with Indexing Table

In order to research the influences of angular misalignment errors of axes to the test result of laser angle interferometer with indexing table,the operational principle of laser angle interferometer with indexing table was described,then an error model of an?gular misalignment was proposed according to the geometric characteristics of the optical path.The influence caused by errors due to an?gular misalignment of axes changing for the rotary angle error was studied.The error control measures was conformed,in order to make sure final accuracy within±1″.A comparison experiment between an autocollimator with high accuracy calcite prism and laser angle in?terferometer with indexing table was completed,for introducing error model.The experimental result was improved,and the maximum difference between the measurements was reduced to-0.52″.The results show that the error model is accurate,which has application value in evaluating and improving the accuracy of the measurement system.