| 荷能离子束沉积的氧化物薄膜光学性质 |
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| 引用本文： | 郭屏,郑舒颖,费微,严昭南,江建国.荷能离子束沉积的氧化物薄膜光学性质[J].光学仪器,1999(Z1). |
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| 作者姓名： | 郭屏 郑舒颖 费微 严昭南 江建国 |
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| 作者单位： | 北京师范大学物理系!北京100875(郭屏)，北京光电技术研究所!北京100010(郑舒颖，费微，严昭南，江建国) |
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| 摘 要： | 报道在不加热的基底上，由双离子束溅射或离子辅助的电子束蒸发技术制造的ＺｒＯ２ 和ＴｉＯ２ 单层薄膜的光学性质，并提供了工艺参数和离子束设备的详情。这两种荷能离子束工艺已被用于光学多层膜，如减反射膜和短波通滤光片的制备。
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| 关 键 词： | 离子束溅射 离子辅助沉积 光学特性 氧化物薄膜 减反射膜 短波通滤光片 |
Optical Properties of Thin Oxide Films Produced by Energetic Ion Beams |
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| GUO Ping.Optical Properties of Thin Oxide Films Produced by Energetic Ion Beams[J].Optical Instruments,1999(Z1). |
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| Authors: | GUO Ping |
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| Abstract: | The optical properties of single layers of ZrO 2 and TiO 2 deposited by dual ion beam sputtering or by ion assisted e beam evaporation on unheated substrates were reported. The process parameters and the information on the experimental setup were given in some detail. The energetic ion beam processes have been used for producing multilayer thin films like antireflection coatings and short wave filters. |
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| Keywords: | Ion Beam Sputtering Ion Assisted Deposition Optical Properties Thin Oxide Films Antireflection Coatings Short Wave Filters |
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