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双光束激光扫描尺寸测量系统
引用本文:张国玉 高玉军. 双光束激光扫描尺寸测量系统[J]. 半导体光电, 1998, 19(5): 320-323
作者姓名:张国玉 高玉军
作者单位:长春光学精密机械学院,中国科学院长春光学精密机械研究所
摘    要:基于激光扫描检测原理,提出了一种用于测量较大直径的双光束激光扫描尺寸测量系统。利用具有良好速度特性和光学准直特性的扫描光学系统。,通过分光光学系统,使扫描光束由一束变为两束,对工件两侧进行双光束扫描,将携带有被测量信息的两路光信号经光合成系统后将两束光进行和接收,经微机数据处理后,给出直径的测量结果。文章详细论述了系统的测量原理、组成和微机控制与数据处理系统,对扫描光学系统设计的有关理论问题进行了

关 键 词:激光扫描 双光束 扫描光学系统 非接触测量

Double beam laser-scanned size measuring system
ZHANG Guoyu AN Zhiyong LI Chengzhi. Double beam laser-scanned size measuring system[J]. Semiconductor Optoelectronics, 1998, 19(5): 320-323
Authors:ZHANG Guoyu AN Zhiyong LI Chengzhi
Abstract:Based on the laser-scanned inspecting principle, a double beams laser-scanned measuring system for size is presented, which is used to measure a diameter. Using the scanning optical system with excellent speed and optical collimating characteristics, through the separated light optical system, one scanning beam is separated into two beams, and the two edges of workpiece are scanned by double beams.Through light composite system the two beam signals with measured information are composed and received, and the measured results of diameter are given through microcomputer data processing, .The measuring principle and composition of the system as well as microcomputer control and data processing system are described in detail, some theoretical problems related to the design of the scanning optical system are discussed.
Keywords:Laser Scanning   Double Beams  Diameter   Scanning Optical System   Non-contact Measurement  
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