Novel Carbon Dioxide Microsensor Based on Tin Oxide Nanomaterial Doped With Copper Oxide

Carbon dioxide $({rm CO}_{2})$ is one of the major indicators of fire and therefore its measurement is very important for low-false-alarm fire detection and emissions monitoring. However, only a limited number of ${rm CO}_{2}$ sensing materials exist due to the high chemical stability of ${rm CO}_{2}$. In this work, a novel ${rm CO}_{2}$ microsensor based on nanocrystalline tin oxide $({rm SnO}_{2})$ doped with copper oxide (CuO) has been successfully demonstrated. The ${rm CuO}hbox{-}{rm SnO}_{2}$ based ${rm CO}_{2}$ microsensors are fabricated by means of microelectromechanical systems technology and sol-gel nanomaterial-synthesis processes. At a doping level of ${rm CuO}:{rm SnO}_{2} =1:8$ (molar ratio), the resistance of the sensor has a linear response to ${rm CO}_{2}$ concentrations for the range of 1% to 4% ${rm CO}_{2}$ in air at 450$^{circ}{rm C}$. This approach has demonstrated the use of ${rm SnO}_{2}$, typically used for the detection of reducing gases, in the detection of an oxidizing gas.