聚焦离子束在微纳尺度材料力学性能研究中的应用

微纳尺度材料是指外观尺寸或其基本构成单元在10nm到10μm之间（以下简称微纳尺度）的材料或器件。个案、定性的研究表明微纳尺度材料有以下特性：其性能不能通过外推基于宏观块体材料的知识体系得到，传统的力学测试工具和方法无法满足对微纳尺度材料进行测试的要求，微纳尺度材料通常在多场耦合条件下服役。这些特性要求研究工作者持续不断地寻找和研发新的工具以期实现对微纳尺度材料的可控制备，高通量观测、操控和定量测量。双束聚焦离子束技术不仅因具有纳米级的空间分辨率而具备对微纳尺度材料的高质量成像和动态监测，而且具备纳米分辨率的定点刻蚀、诱导沉积等功能。因此，双束聚焦离子束成为研究微纳尺度材料力学性能的有力工具。综述了近年来聚焦离子束技术在微纳尺度材料类力学性能研究中的应用，并讨论了其局限性和发展趋势。

Applications of Focused Mechanical Properties Ion Beam in the Study on of Micro/Nanomaterials

Micro/nanomaterials refer to the materials or devices with their physical dimension or basic unit size in the range of 10 nm to 10, 000 nm. It has been demonstrated occasionally and qualitatively that the properties of micro/nano-materials exhibit the following characteristics： can not be achieved through extrapolating the knowledge system based on their bulk counterpart; the traditional technologies and methods are insufficient to study them efficiently; multi fields are always involved in the real applications of Miero/nanomaterials. These characteristics require the researchers to find and develop new tools and methods continuously in order to fabricate, monitor, manipulate and test these materials effectively. Dual beam focused ion beam （FIB） can not only be used to image, monitor and manipulate the materials but also has the ability to etch samples to expected geometry and deposit materials for welding et al. at nanometer resolution. Consequent-ly, dual beam FIB has become a powerful tool in the research of nanomechanics. In this paper, the state of the art applica- tions of FIB in nanomechanies research will be reviewed. Its limitation and future development will be also discussed.