强碱-阳极氧化法处理Ti片制备TiO_2薄膜的研究

本文利用强碱-阳极氧化法对钛片进行改性,制备TiO2薄膜;用扫描电镜（SEM）、X射线光电子能谱（XPS）考察了不同电解液浓度下氧化电压对TiO2氧化膜形貌及组成的影响。结果发现,在本实验条件下,该法制得的氧化膜是由三种钛氧化物组成的,主要成分是TiO2,此外还有低价钛氧化物Ti2O3及TiO;氧化电压的不同会对薄膜形貌产生重要的影响,当氧化电压较高时,氧化膜的厚度比较厚且致密;钛表面生成氧化膜大致过程可概括为：Ti→TiO→Ti2O3→TiO2,其中TiO转为为TiO2的几率依靠电势的大小及氧化时间的长短。

Study on Preparation of TiO2 Thin Films by Alkali-anodic Oxidation Treatment on Ti foils

In this article,TiO2 films were prepared via modification to the surface of titanium foils by strong alkali-anodic oxidation.The effects of anode voltage on the morphology and chemical composition of the films were systematically investigated by using scanning electron microscopy(SEM) and X-ray photoelectron spectroscopy(XPS).The oxide films consist of three kinds of titanium oxides,mainly in the form of TiO2,with sub-oxides Ti2O3 and TiO.In addition,the film morphology depended on the anode voltage and different morphologies could be prepared under different anode voltages while keeping other conditions the same.The films were thicker and denser with higher voltage.The process of generating oxide films on the titanium surface was Ti■TiO■Ti2O3■TiO2 and the probability of transfer TiO to TiO2 depended on the oxidizing voltages and duration.