添加剂对CBS系LTCC基板的匹配性能的影响

采用水淬法制备了CaO-B2O3-SiO2(CBS)玻璃,研究了MgO替代Na2O、K2O掺杂对所制CBS玻璃的烧结性能、介电性能和热膨胀性能的影响。结果表明:MgO的替代掺杂使CBS玻璃的软化温度提高,黏度活化能增大,银离子扩散能力减弱,并使CBS玻璃与银电极匹配共烧发黄的现象得到改善。含有0.2%MgO和0.1%Na2O(质量分数)并于850℃烧结制备的CBS玻璃性能较佳:密度为2.45 g/cm3,1MHz频率下εr为5.98,tanδ为5×10–4,线膨胀系数为10.1×10–6/℃。

Effects of additive on the properties of CBS substrate of LTCC components

CaO-B2O3-SiO2(CBS) glass was prepared by water quenching with the Na2O and K2O doping being substituted by MgO. The effects of MgO addition on the sintering performance, dielectric properties and thermal expansion of the prepared CBS glass were studied. The results show that substituting Na2O and K2O with MgO increases the softening temperature and viscosity activation energy of the CBS glass, inhibits the diffusion of silver ions and the presence of yellow color during the co-firing process of CBS glass and silver electrode. The CBS glass sintered at 850 ℃ and containing 0.2%(mass fraction) MgO and 0.1%(mass fraction) Na2O shows a better performance: density ρ=2.45 g/cm3, relative permittivity εr=5.98 and dielectric loss tanδ=5×10–4 at 1 MHZ, thermal expansion coefficient α=10.1×10–6/℃.