| 基于碳纳米管的微纳机电器件应用研究 |
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| 引用本文： | 张冬至,夏伯锴,王凯,童俊. 基于碳纳米管的微纳机电器件应用研究[J]. 电子元件与材料, 2012, 31(3): 71-76 |
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| 作者姓名： | 张冬至 夏伯锴 王凯 童俊 |
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| 作者单位： | 中国石油大学(华东)信息与控制工程学院,山东青岛,266555 |
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| 基金项目： | 中央高校基本科研业务费专项资金资助，国家级和校级大学生创新训练计划基金 |
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| 摘 要： | 综述了近年来碳纳米管在微纳传感器、纳米发电机、纳米执行器、纳米电子器件、纳米收音机与薄膜扬声器等方面取得的瞩目成果及典型应用,介绍了基于碳纳米管的微纳机电器件的制造工艺、器件性能及其研究进展,指出了碳纳米管基微纳机电器件在多元化发展、工艺多样化、材料复合化、产业化工程等方面的发展趋势。
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| 关 键 词： | 碳纳米管 微纳器件 综述 微纳传感器 制造工艺 纳米制造 |
Application research of carbon nanotube-based micro/nano electromechanical devices |
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| ZHANG Dongzhi , XIA Bokai , WANG Kai , TONG Jun. Application research of carbon nanotube-based micro/nano electromechanical devices[J]. Electronic Components & Materials, 2012, 31(3): 71-76 |
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| Authors: | ZHANG Dongzhi XIA Bokai WANG Kai TONG Jun |
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| Affiliation: | (College of Information and Control Engineering,China University of Petroleum(East China),Qingdao 266555,Shandong Province,China) |
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| Abstract: | The remarkable achievements and typical applications of carbon nanotube(CNT) used in recent years for fabricating micro/nano sensors,nano-generators,nano-actuators,nano-electronic devices,nano radios and film speakers are reviewed,and the fabrication process,devices performance and lastest progress of CNT-based micro/nano electro-mechanical devices(M/NEMDs) are introduced.The future trends in development of all-direction,diversification of fabrication,composition of material and industrialization of engineering for CNT-based M/NEMDs are illustrated. |
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| Keywords: | carbon nanotube micro/nano devices review micro/nano sensor fabrication process nano fabrication |
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