| 射频磁控溅射制备钛酸锶钡薄膜的研究进展 |
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| 引用本文： | 林泽彬,蔡苇,刘行冰,宋云霞,符春林. 射频磁控溅射制备钛酸锶钡薄膜的研究进展[J]. 电子元件与材料, 2012, 31(5): 71-75 |
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| 作者姓名： | 林泽彬 蔡苇 刘行冰 宋云霞 符春林 |
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| 作者单位： | 重庆科技学院冶金与材料工程学院,重庆,401331 |
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| 基金项目： | 国家自然科学基金资助项目(No.51102288);重庆市自然科学基金资助项目(No.CSTC2010BB4286);重庆科技学院校内科研基金资助项目(No.CK2010Z05),重庆科技学院第六届大学生科技创新计划项目,重庆科技学院第四届优秀创新人才培养计划项目资助 |
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| 摘 要： | 综述了射频磁控溅射制备钛酸锶钡(BST)薄膜的国内外研究动态,详细阐述了溅射工艺参数(电极、溅射气压、氧分压、温度)对BST薄膜微结构和电性能的影响,提出了射频磁控溅射制备BST薄膜中亟待解决的问题。
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| 关 键 词： | 铁电薄膜 钛酸锶钡 综述 射频磁控溅射 介电性能 |
Research progress on barium strontium titanium thin films deposited by RF magnetron sputtering |
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| LIN Zebin , CAI Wei , LIU Xingbing , SONG Yunxia , FU Chunlin. Research progress on barium strontium titanium thin films deposited by RF magnetron sputtering[J]. Electronic Components & Materials, 2012, 31(5): 71-75 |
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| Authors: | LIN Zebin CAI Wei LIU Xingbing SONG Yunxia FU Chunlin |
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| Affiliation: | (School of Metallurgy and Materials Engineering,Chongqing University of Science and Technology,Chongqing 401331,China) |
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| Abstract: | The domestic and foreign research tendency of barium strontium titanium(BST) films prepared by RF magnetron sputtering is reviewed.Effects of RF magnetron sputtering parameters(including electrode,sputtering pressure,oxygen partial pressure and temperature) on microstructure and electric properties of BST thin films are described in detail.Finally,some problems needed to be solved on preparation of BST thin films are proposed. |
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| Keywords: | ferroelectric film barium strontium titanium review RF magnetron sputtering dielectric properties |
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