| Profilometry with Grating Projection Based on One—step Phase Shift |
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| 引用本文： | FANYun－zheng.Profilometry with Grating Projection Based on One—step Phase Shift[J].半导体光子学与技术,2001,7(3):189-192. |
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| 作者姓名： | FANYun－zheng |
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| 作者单位： | SchoolofPhysicsandMicroelectronics,ShangongUniversity,Jinan250061,CHN |
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| 摘 要： | An optical technique for 3-Dshape measurement is presented.This technique,based on a deformed projected grating pattern which carries 3-D information of the measured object,can automatically and accurately obtain the phase map of a measured object by using one-step phase shift algorithm.In comparison with traditional phase-shift technique,the echnique is much faster,with the equivalent accuracy.Only one frame image is sufficient for measuring.Experimental result of typical object is presented.
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| 关 键 词： | 三维表面轮廓 相移 表面光度测定法 光栅投影 |
| 收稿时间： | 2001/5/17 |
Profilometry with Grating Projection Based on One-step Phase Shift |
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| FAN Yun-zheng.Profilometry with Grating Projection Based on One-step Phase Shift[J].Semiconductor Photonics and Technology,2001,7(3):189-192. |
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| Authors: | FAN Yun-zheng |
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| Abstract: | An optical technique for 3 D shape measurement is presented. This technique, based on a deformed projected grating pattern which carries 3 D information of the measured object, can automatically and accurately obtain the phase map of a measured object by using one step phase shift algorithm.In comparison with traditional phase shift technique, the technique is much faster, with the equivalent accuracy. Only one frame image is sufficient for measuring. Experimental result of typical object is presented. |
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| Keywords: | 3-D surface contouring Phase shift Profilometry of projected grating |
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