磁悬浮转子微陀螺中转子微加工方法的研究

微陀螺是微小卫星、微飞行器等装备中不可缺少的惯性器件，磁悬浮转子陀螺能克服机械支承和定位的摩擦，使之可以达到普通陀螺的精度要求。本文介绍了磁悬浮转子微陀螺的基本原理，根据产生电涡流、保持稳定悬浮和旋转的需求，对转子进行了设计，对比研究了溅射、蒸镀、冲压等三种加工微转子的方法，悬浮试验证明冲压铝箔法制备的转子能够满足微陀螺的要求。

Study on Micro Machining the Rotor of a Micro Gyroscope Based on Magnetic Suspension Rotor

Micro-gyroscope is treated as one of the key inertial apparatus of mini-satellites and micro-aircrafts.Magnetic suspension system of the design could avoid friction problems caused by mechanical bearing and localization that are key issues in other kind of micro-gyroscopes,so as to achieve high precision as ordinary gyroscopes.The principle of a magnetic suspension rotor for application as a micro-gyroscope is presented. The design of the rotor is drawn according to requirements of creating eddy currents,maintaining stable levitation and continuous rotation. Fabrication methods of rotor,such as sputtering,evaporation and punching,are studied by contrast. It has been proved by levitation experiments of the gyro that the fabrication method of punching the Al film is a promising way to fabricate rotor that could meet the requirements of the micro-gyroscope.