Single-step replicable microfluidic check valve for rectifying and sensing low Reynolds number flow |
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Authors: | J Loverich I Kanno H Kotera |
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Affiliation: | (1) Department of Micro Engineering, Yoshida-Honmachi, Sakyo-ku, 606-8501 Kyoto, Japan |
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Abstract: | This paper presents a new microfluidic check valve well suited for low Reynolds number flow rate sensing, micropump flow rectification,
and flow control in lab-on-a-chip devices. The valve uses coupling between fluid movement in a channel and an elastomeric
column (flap) suspended in the fluid path to generate a strong anisotropic flow resistance. Soft lithography-based molding
techniques were used to fabricate the valve, allowing for a low-cost, single-step fabrication process. Three valves—having
heights of 25, 50, and 75 μm, respectively—were fabricated and experimentally evaluated; the best of them demonstrated a maximum
fluidic diodicity of 4.6 at a Reynolds number of 12.6 and a significant diodicity of 1.6 at the low Reynolds number of 0.7.
The valve’s notable low Reynolds number response was realized by adopting a design methodology that balances the stiffness
of the elastomer flap and adhesion forces between the flap and its seat. A pair of elastomer check valves integrated with
a miniature membrane actuator demonstrated a flow rectification efficiency of 29.8%. The valve’s other notable features include
a wide bandwidth response, the ability to admit particles without becoming jammed, and flow rate sensing capability based
on optical flap displacement measurements. |
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Keywords: | Check valve Microfluidic diode Flow rectification |
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