Ordered arrays of nanocolumns grown by the oblique angle deposition technique on a self-assembled layer of polystyrene spheres |
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Authors: | R.J. Martí n-Palma,M. Manso-Silvá n,C.G. Pantano |
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Affiliation: | a Materials Research Institute and Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA 16802, USA b Departamento de Física Aplicada, Universidad Autónoma de Madrid, 28049 Cantoblanco, Madrid, Spain c Materials Research Institute and Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA 16802, USA |
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Abstract: | Ordered arrays of upright nanocolumns of chalcogenide glass were fabricated by combining the oblique angle deposition technique with substrate rotation. Self-assembled close-packed arrays of polystyrene spheres of 200 nm and 500 nm in diameter were used as templates. Our method allows the fabrication of GeSbSe nanocolumns of controlled height, cross-sectional diameter and two-dimensional distribution. Finally, preliminary optical characterization suggests the possible use of the ordered arrays of GeSbSe nanocolumns in optical devices, in particular photonic crystals. |
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Keywords: | Oblique angle deposition Chalcogenide Colloidal lithography Thermal evaporation Photonic crystal |
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