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Ordered arrays of nanocolumns grown by the oblique angle deposition technique on a self-assembled layer of polystyrene spheres
Authors:R.J. Martí  n-Palma,M. Manso-Silvá  n,C.G. Pantano
Affiliation:a Materials Research Institute and Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA 16802, USA
b Departamento de Física Aplicada, Universidad Autónoma de Madrid, 28049 Cantoblanco, Madrid, Spain
c Materials Research Institute and Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA 16802, USA
Abstract:Ordered arrays of upright nanocolumns of chalcogenide glass were fabricated by combining the oblique angle deposition technique with substrate rotation. Self-assembled close-packed arrays of polystyrene spheres of 200 nm and 500 nm in diameter were used as templates. Our method allows the fabrication of GeSbSe nanocolumns of controlled height, cross-sectional diameter and two-dimensional distribution. Finally, preliminary optical characterization suggests the possible use of the ordered arrays of GeSbSe nanocolumns in optical devices, in particular photonic crystals.
Keywords:Oblique angle deposition   Chalcogenide   Colloidal lithography   Thermal evaporation   Photonic crystal
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