Production of Carbon Nanotubes by the Magnetron DC Sputtering Method

Carbon films containing multiwall nanotubes were produced by the magnetron dc sputtering method. A graphite disc with Y and Ni catalyst plates was used as a target. The structural and morphological properties of the films were investigated using a JEM 2000EXII transmission electron microscope. The films were deposited on glass, nickel, fluoroplastic, and other materials. The films produced contained up to 40% of multiwall carbon nanotubes with diameters of 4–16 nm and a length of ≥200 nm.__________Translated from Pribory i Tekhnika Eksperimenta, No. 3, 2005, pp. 150–152.Original Russian Text Copyright © 2005 by Antonenko, Mal’tsev.